Fluorocarbon plasmas are used in the production of RADCAL semiconductor materials. In the Journal of Applied Physics

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Fluorocarbon plasmas are used in the production of RADCAL semiconductor materials. In the Journal of Applied Physics (Dec. 1. 2000). electrical engineers at Nagoya University (Japan) studied the kinetics of fluorocarbon plasmas in order to optimize material processing. In one portion of the study, the surface production rate of fluorocarbon radicals emitted from the production process was measured at various points in time (in milliseconds) after the radio frequency power was turned off. The data are given in the next table. Consider a model relating surface production rate (y) to time (x)
Fluorocarbon plasmas are used in the production of RADCAL semiconductor

a. Graph the data in a scatter plot. What trend do you observe?
b. Fit a quadratic model to the data. Give the least squares prediction equation
c. Is there sufficient evidence of upward curvature in the relationship between surface production rate and time after turnoff? Use a = .05.

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Statistics For Business And Economics

ISBN: 9780321826237

12th Edition

Authors: James T. McClave, P. George Benson, Terry T Sincich

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