If a square mask of side length 100 (m is placed on a {100} plane and oriented
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If a square mask of side length 100 (m is placed on a {100} plane and oriented with a side in the (110) direction, how long will it take to etch a hole 4 (um deep at 80°C using thylene-diamine / pyrocatechol? Sketch the resulting profile.
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Related Book For
Manufacturing Processes for Engineering Materials
ISBN: 978-0132272711
5th edition
Authors: Serope Kalpakjian, Steven Schmid
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