A process technician plans to grow a 500nm thick thermal oxide. His plan was to grow...
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A process technician plans to grow a 500nm thick thermal oxide. His plan was to grow the oxide in H₂0 at 1000°C. He calculated the time needed and started the process. However, when the process is done, he noticed the oxide thickness is much thinner than expected. Then he noticed he forgot to turn on the "H₂" torch for the H₂O oxidation. Calculate the extra time needed to get the final oxide thickness equal to 500nm (in H₂0 at 1000°C). Assume (100) silicon. A process technician plans to grow a 500nm thick thermal oxide. His plan was to grow the oxide in H₂0 at 1000°C. He calculated the time needed and started the process. However, when the process is done, he noticed the oxide thickness is much thinner than expected. Then he noticed he forgot to turn on the "H₂" torch for the H₂O oxidation. Calculate the extra time needed to get the final oxide thickness equal to 500nm (in H₂0 at 1000°C). Assume (100) silicon.
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Answer rating: 100% (QA)
To calculate the extra time needed to achieve the desired oxide thickness we can use Ficks first law ... View the full answer
Related Book For
Data Analysis and Decision Making
ISBN: 978-0538476126
4th edition
Authors: Christian Albright, Wayne Winston, Christopher Zappe
Posted Date:
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