Suppose you have made the eight runs in the 2 5-2 design in Problem 8-4. What additional
Question:
Suppose you have made the eight runs in the 25-2 design in Problem 8-4. What additional runs would be required to identify the factor effects that are of interest? What are the alias relationships in the combined design?
Problem 8-4.
Problem 6-21 describes a process improvement study in the manufacturing process of an integrated circuit. Suppose that only eight runs could be made in this process. Set up an appropriate 25-2 design and find the alias structure. Use the appropriate observations from Problem 6-21 as the observations in this design and estimate the factor effects. What conclusions can you draw?
Problem 6-21
An experiment was run in a semiconductor fabrication plant in an effort to increase yield. Five factors, each at two levels, were studied. The factors (and levels) were A = aperture setting (small, large), B = exposure time (20% below nominal, 20% above nominal), C = development time (30 s, 45 s), D = mask dimension (small, large), and E = etch time (14.5 min, 15.5 min). The unreplicated 25 design shown below was run.
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