2. a) Inductively-coupled RF plasma (ICP) systems are often used to etch silicon wafers in the...
Fantastic news! We've Found the answer you've been seeking!
Question:
Transcribed Image Text:
2. a) Inductively-coupled RF plasma (ICP) systems are often used to etch silicon wafers in the manufacture of microelectronics. These systems utilize external coils as electrodes. i) ii) Explain briefly the fundamental principles of induction, which can lead to the creation of dense plasma away from the coil. Include in your answer a suitable diagram showing the relevant EM fields. Draw a sketch of two ICP designs that employ different geometries for the external coils. Include in your sketch, the chamber walls and the wafer substrates. Label all the important features. In many silicon etching applications CF4 is used as an etchant, however an engineer decides to use CCl4 instead. iii) Write down the main plasma-chemical reactions involving the bombardment of CCl4 by electrons. iv) Which species created in the plasma would be responsible for isotropic etching of the silicon and which would be responsible for anisotropic etching? 2. a) Inductively-coupled RF plasma (ICP) systems are often used to etch silicon wafers in the manufacture of microelectronics. These systems utilize external coils as electrodes. i) ii) Explain briefly the fundamental principles of induction, which can lead to the creation of dense plasma away from the coil. Include in your answer a suitable diagram showing the relevant EM fields. Draw a sketch of two ICP designs that employ different geometries for the external coils. Include in your sketch, the chamber walls and the wafer substrates. Label all the important features. In many silicon etching applications CF4 is used as an etchant, however an engineer decides to use CCl4 instead. iii) Write down the main plasma-chemical reactions involving the bombardment of CCl4 by electrons. iv) Which species created in the plasma would be responsible for isotropic etching of the silicon and which would be responsible for anisotropic etching?
Expert Answer:
Related Book For
Posted Date:
Students also viewed these physics questions
-
Let A, B be sets. Define: (a) the Cartesian product (A B) (b) the set of relations R between A and B (c) the identity relation A on the set A [3 marks] Suppose S, T are relations between A and B, and...
-
A dry etch process is used to etch silicon dioxide (SiO2) off of silicon wafers. An engineer wishes to study the uniformity of the etching across the surface of the wafer. A total of 10 wafers are...
-
Suppose you have a subject property with a 105,000 sq. ft. lot and existing improvements for which you estimate the reproduction cost new to be $2,500,000, physical deterioration to be $400,000,...
-
Big Bend Co. fixed budget for the year is shown below: Prepare a flexible budget for Big Bend Co. that shows a detailed budget for its actual sales volume of 42,000 units. Use the contribution margin...
-
Um Good, Inc., a candy maker, is thinking of purchasing a new machine. A marketing firm has estimated that the new machine could increase revenues by $25,000 a year for the next five years. The...
-
During the inspection of a rejected integrated circuit (IC), it was observed that the rejected IC could have an incorrect circuit, it could be bent, or it could have both defects. The probability of...
-
Monsecours Corp., a public company incorporated on June 28, 2013, setup a single account for all of its intangible assets. The following summary discloses the debit entries that were recorded during...
-
Pastina Company sells various types of pasta to grocery chains as private label brands. The company's reporting year - end is December 3 1 . The unadjusted trial balance as of December 3 1 , 2 0 2 4...
-
I farm on a small scale. Last year, I started off by planting soybeans and corn. This year, the price of soybeans increased, and the price of corn remained the same. Naturally, I planted more corn...
-
Post Covid the cost of beef in general has severely increased. Though there was a rise in beef prices pre-Covid, it has only gotten worse due to shortages in feed, and an increase in labor costs....
-
Claudia purchased a rental property in 2 0 1 8 for $ 2 2 5 , 0 0 0 , which included $ 2 5 , 0 0 0 for land. Claudia took all allowable depreciation, totaling $ 2 0 , 0 0 0 . She sold the property in...
-
Explain using practical examples, why from a management perspective the statement of cash flow is more important than the profit or loss statement.
-
When evaluating a product offering, are consumers more likely to buy a product for its features, its benefits, or a combination of both?
-
Reflecting on your own experiences being part of a team in school or work, what are some of the advantages and disadvantages to teamwork? Teamwork Advantages Teamwork Disadvantages
-
Differentiate between an opportunity and an idea and describe four rules for formal brainstorming session. please wrote refernces.
-
A combined separating and throttling calorimeter has been used to measure the dryness of very wet steam. A particular test gave the following results: Main pressure: 3.4 x 10 N/m? gauge. Mass of...
-
Using the parallel-axis theorem, determine the product of inertia of the area shown with respect to the centroidal x and y axes. 6 in. 9 in. 9 in- 4.5 in. in. 4.5 in.
-
Acrylic resins used in the fabrication of dentures should not absorb much water, since water sorption reduces strength. The article "Reinforcement of Acrylic Resin for Provisional Fixed Restorations....
-
In a study to determine the relationship between ambient outdoor temperature and the rate of evaporation of water from soil, measurements of average daytime temperature in ¦C and evaporation...
-
Let Z represent the total number of vehicles that pass through the toll booth in a one-minute time interval. a. Find μZ. b. Find ÏZ. c. Find P (Z = 2). In Exercise 12 0 0.10 0.05...
-
If a politician running for office does not speak in general terms, does not try to move to the middle of the political spectrum, and does not take polls, is the median voter model therefore wrong?
-
Voters often criticize politicians running for office who do not speak in specific terms (i.e., who do not specify which spending programs will be cut, whose taxes will be raised, etc.). If voters...
-
Why is rent-seeking activity socially wasteful?
Study smarter with the SolutionInn App