For the Micro Electro Mechanical System for surface scanning shown below, driven by an electrostatic attraction force,
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Question:
For the Micro Electro Mechanical System for surface scanning shown below, driven by an electrostatic attraction force, the following equation drives the membrane:
This device’s operational mechanism, which can measure distances smaller than a pico-meter (10-12 m), is
illustrated in the following figure:
The displacement x of the following figure is measured from the equilibrium position of the membrane:
SOLVE: Linearize the system around an equilibrium point(x̅,v). Find the transfer function G(s) = X(s)/V(s) that is valid about the equilibrium. Show that G(s) becomes unstable for x̅ > x_0 / 3.
Related Book For
Fundamentals Of Momentum Heat And Mass Transfer
ISBN: 9781118947463
6th Edition
Authors: James Welty, Gregory L. Rorrer, David G. Foster
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