The accompanying figure shows a mirror that is suspended on a torsional beam; it can be inclined through electrostatic attraction by applying a voltage on either side of the mirror at the bottom of the trench. Make a flow chart of the manufacturing operations required to produce this device?

Transcribed Image Text:

550 ㎛ demeter Mmor Moving Comb Teeth Torsion Hinge Fixed Comb Teeth Anchor