Ozone gas (O 3 , solute A) dissolved in high-purity water is commonly used in wet cleaning

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Ozone gas (O3, solute A) dissolved in high-purity water is commonly used in wet cleaning processes associated with semiconductor device fabrication. It is desired to produce a liquid water stream containing 3.0 gmole O3/m3(238 mg/L) by a process that does not create any gas bubbles. One engineer€™s idea is shown in the figure below. Liquid water containing 1.0 gmole O3/m3enters a well-mixed tank at a volumetric flow rate 0.050 m3/h. A pressurized gas mixture of O3diluted in inert N2is continuously added the head space of the tank at a total pressure of 1.5 atm. Both the liquid and gas inside the tank are assumed to be well mixed. The gas€”liquid surface area inside the tank is 4.0 m2. The process is maintained at 20°C. At 20°C, the solution density is 992.3 kg/m3. For a well-mixed, non-bubbled ozonation tank, the appropriate film mass-transfer coefficients for the liquid and gas films are kL= 3.0 · 10-6m/s and kc= 5.0 · 10-3m/s, respectively. Equilibrium distribution data for O3gas dissolved in water at 20°C follows Henry€™s law, with H = 68.2 m3atm/kgmole based on the definition pA,i= H · cAL,i.P. Closed Tank N2+O3 | GAS N2+O3 gas OUT P = 1.5 atm gas IN well-mixed PA = ? Water + Water + NA dissolved O, IN dissolv

a. What are m, and the Henry€™s law constant H in units of atm? Is O3 very soluble in water?
b. What is the overall mass-transfer coefficient KG, based on the overall gas-phase driving force?
c. What is the overall mass-transfer coefficient KL based on the overall liquid-phase driving force?
d. For the process to operate as intended, what are the required partial pressure (pA) and mole fraction (yA) of ozone (O3) in the gas phase inside the tank? As part of your solution,

develop a material balance model in algebraic form for solute A that contains the following terms: v0, volumetric flow rate of liquid (m3/hr); cAL,0, inlet concentration of solute A in liquid (gmole A/m3); cAL, outlet concentration of solute A in liquid (gmole O3/m3); KG, overall mass-transfer coefficient based on gas-phase driving force (gmole/m2 · s · atm), pA partial pressure of O3 in bulk gas phase (atm); H, Henry€™s law constant for O3 between gas and liquid (m3 · atm/gmole); S, surface area for inter phase mass-transfer (m2). 

e. What is the total transfer rate of O3, WA

f. Is the mass-transfer process is gas film controlling, liquid film controlling, or neither? Comment on the relative contributions of the film mass-transfer coefficients and the equilibrium distribution relationship on the controlling mass-transfer resistance.

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Fundamentals Of Momentum Heat And Mass Transfer

ISBN: 9781118947463

6th Edition

Authors: James Welty, Gregory L. Rorrer, David G. Foster

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