Based on the SIMS spectrum of Fig. 18.11: (a) Estimate the thickness of the oxide layer that
Question:
Based on the SIMS spectrum of Fig. 18.11:
(a) Estimate the thickness of the oxide layer that has formed on the surface.
(b) Si is an n-type dopant in the GaN material system. What is the doping
concentration away from the surface?
Transcribed Image Text:
(Cs+ bombardment, negative ion detection) 1E+20 Si Ga (au) 1E+19 1E+18 1E+17 0.5 1.5 Depth (um) Concentration (at/cc)
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