Determine the growth rate of a layer grown by MOCVD using the following parameters: Diffusion coefficient (D)
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Determine the growth rate of a layer grown by MOCVD using the following parameters:
Diffusion coefficient (D) = 5 × 10-6 cm2.s-1 Thickness of the boundary layer (d) = 5 mm Surface reaction chemical rate constant (ks) = 10-3 cm.s-1 Concentration of reactants in gas phase (CG) = 1018 cm-3 Maximum number of reactants incorporating into the crystal (C) = 1020 cm-3
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