Silicon nitride is a commonly used masking material in microfabrication. Based on the positions of silicon and

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Silicon nitride is a commonly used masking material in microfabrication. Based on the positions of silicon and nitrogen in the periodic table, what is the most likely chemical formula for silicon nitride? Explain your answer.

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Chemistry For Engineering Students

ISBN: 9780357026991

4th Edition

Authors: Lawrence S. Brown, Tom Holme

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