Trimethyl gallium, Ga(CH3 ) 3, can be used as a feed gas to grow fi lms of
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Trimethyl gallium, Ga(CH3 ) 3, can be used as a feed gas to grow fi lms of GaAs. Estimate the enthalpy of vaporization of Ga(CH3) 3 from the data of saturation pressure vs. temperature given in Table E6.3.
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