Discuss the difference between DC and RF sputtering. What technique will you use for sputtering insulating...

 

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Discuss the difference between DC and RF sputtering. What technique will you use for sputtering insulating materials? Why? We discussed Rutherford back scattering in the class. Typical kinetic energy of the He ion is about 1-2 MeV. We also discussed in the class that relativistic effects would be important, once the speed of a particle is close to the speed of light. Now, can you check whether we need to worry about relativistic effects? At what energy (roughly) we need to start worrying about relativistic effects for He ions? If I did the acceleration of electron instead of Helium, at what energy does the relativistic effects kick in? Make necessary approximations, if needed Some useful constants: Particle Charge (x 1.6 x10-19 C) Proton Neutron Electron +1 0 -1 Mass (kg) ~1.7 x 10-27 g -1.7 x 10-27 g -9.1 x 10-30 g Speed of light is 3 x 108 m/s and Helium atom has 2 protons, 2 neutrons and 2 electrons. Derive the energy and momentum conservation equations for this classical mass scattering scenario, where the masses, velocity before and after collision, angle at which the path of the collided particles diverge after collision. Discuss the difference between DC and RF sputtering. What technique will you use for sputtering insulating materials? Why? We discussed Rutherford back scattering in the class. Typical kinetic energy of the He ion is about 1-2 MeV. We also discussed in the class that relativistic effects would be important, once the speed of a particle is close to the speed of light. Now, can you check whether we need to worry about relativistic effects? At what energy (roughly) we need to start worrying about relativistic effects for He ions? If I did the acceleration of electron instead of Helium, at what energy does the relativistic effects kick in? Make necessary approximations, if needed Some useful constants: Particle Charge (x 1.6 x10-19 C) Proton Neutron Electron +1 0 -1 Mass (kg) ~1.7 x 10-27 g -1.7 x 10-27 g -9.1 x 10-30 g Speed of light is 3 x 108 m/s and Helium atom has 2 protons, 2 neutrons and 2 electrons. Derive the energy and momentum conservation equations for this classical mass scattering scenario, where the masses, velocity before and after collision, angle at which the path of the collided particles diverge after collision.

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In classical physics the kinetic energy of a particle is given by KE 12mv2 where m is the mass of th... View the full answer