Using a surface micromachining process with a 2-um sacrificial layer thickness and a 3-m structural layer...
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Using a surface micromachining process with a 2-um sacrificial layer thickness and a 3-m structural layer thickness, design a differential X-axis accelerometer (acceleration in plane with the substrate) that has the electrode capacitances 0.2 pF, the sensitivity to acceleration is AC/|| = 1 fF/G, and the maximum range is 5 G. Optimize your design for the smallest rectangular footprint. Assume that the capacitor gap is d = 2 m, the smallest mechanical structure width is w = 2 m, and the Young's modulus is E = 150 GPa. Cwl: Cw1 - = Using a surface micromachining process with a 2-um sacrificial layer thickness and a 3-m structural layer thickness, design a differential X-axis accelerometer (acceleration in plane with the substrate) that has the electrode capacitances 0.2 pF, the sensitivity to acceleration is AC/|| = 1 fF/G, and the maximum range is 5 G. Optimize your design for the smallest rectangular footprint. Assume that the capacitor gap is d = 2 m, the smallest mechanical structure width is w = 2 m, and the Young's modulus is E = 150 GPa. Cwl: Cw1 - =
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To design a differential Xaxis accelerometer with the given specifications we can follow these steps 1 Determine the desired capacitance values Given Cw1 Cw2 02 pF we can use these values as the desir... View the full answer
Related Book For
Fundamentals Of Momentum Heat And Mass Transfer
ISBN: 9781118947463
6th Edition
Authors: James Welty, Gregory L. Rorrer, David G. Foster
Posted Date:
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