A certain design rule calls for metal lines to be no less than 2 (m wide. If
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A certain design rule calls for metal lines to be no less than 2 (m wide. If a 1 (m-thick metal layer is to be wet etched, what is the minimum photoresist width allowed? (Assume that the wet etch is perfectly isotropic.) What would be the minimum photoresist width if a perfectly anisotropic dry-etch process were used?
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The etching is equal in both the horizontal and verti...View the full answer
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Sumit kumar
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QUATERNARY Pursuing M.Tech.(2017-2019) in Electronics and Communication Engg. (VLSI DESIGN) from
GNIOT Greater Noida
TERTIARY B.Tech. (2012-2016) in Electronics and Communication Engg. from GLBITM Greater Noida
SECONDARY Senior Secondary School Examination (Class XII) in 2012 from R.S.S.Inter College, Noida
ELEMENTARY Secondary School Examination (Class X) in 2010 from New R.J.C. Public School ,Noida
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Related Book For 
Manufacturing Processes for Engineering Materials
ISBN: 978-0132272711
5th edition
Authors: Serope Kalpakjian, Steven Schmid
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