Question: A certain design rule calls for metal lines to be no less than 2 (m wide. If a 1 (m-thick metal layer is to be

A certain design rule calls for metal lines to be no less than 2 (m wide. If a 1 (m-thick metal layer is to be wet etched, what is the minimum photoresist width allowed? (Assume that the wet etch is perfectly isotropic.) What would be the minimum photoresist width if a perfectly anisotropic dry-etch process were used?

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