If an amount of energy Q'' o (J/m 2 ) is released instantaneously, as, for example, from

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If an amount of energy Q''o (J/m2) is released instantaneously, as, for example, from a pulsed laser, and it is absorbed by the surface of a semi-infinite medium, with no attendant losses to the surroundings, the subsequent temperature distribution in the medium is where Ti is the initial, uniform temperature of the medium. Consider an analogous mass transfer process involving deposition of a thin layer of phosphorous (P) on a silicon (Si) wafer at room temperature. If the wafer is placed in a furnace, the diffusion of Pinto Si is significantly enhanced by the high-temperature environment, A Si wafer with 1-μm-thick P film is suddenly placed in a furnace at 1000oC, and the resulting distribution of P is characterized by an expression of the form where M''p,0, is the molar area density (k mol/m2) of P associated with the film of concentration C p and thickness do.

(a) Explain the correspondence between variables in the analogous temperature and concentration distributions.

(b) Determine the mole fraction of P at a depth of 0.1μm in the Si after 30s. The diffusion coefficient is Dp – Si = 1.2 x 10-17 m2/s. The mass densities of P and Si are 2000 and 2300 kg/m3, respectively, and their molecular weights are 30.97 and 28.09 kg/k mol.

Tix, 1) — т, — pe(Tat)2 exp(-x³14a1) 1/2 Tx,0) = T; P, c, k Tx,) Limit qAr = Q

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Fundamentals of Heat and Mass Transfer

ISBN: 978-0471457282

6th Edition

Authors: Incropera, Dewitt, Bergman, Lavine

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