Question: A resist is applied in a resist spinner spun operating at 2000 rpm, using a polymer resist with viscosity of 0.05 N-s/m. The measured resist

A resist is applied in a resist spinner spun operating at 2000 rpm, using a polymer resist with viscosity of 0.05 N-s/m. The measured resist thickness is 1.5 (m. What is the expected resist thickness at 6000 rpm? Let ( = 1.0 in Eq. (13.3)?

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