A resist is applied in a resist spinner spun operating at 2000 rpm, using a polymer resist

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A resist is applied in a resist spinner spun operating at 2000 rpm, using a polymer resist with viscosity of 0.05 N-s/m. The measured resist thickness is 1.5 (m. What is the expected resist thickness at 6000 rpm? Let ( = 1.0 in Eq. (13.3)?

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Manufacturing Processes for Engineering Materials

ISBN: 978-0132272711

5th edition

Authors: Serope Kalpakjian, Steven Schmid

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Question Posted: Jul 18, 2016 09:26 AM

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A resist is applied in a resist spinner spun operating at 2000 rpm, using a polymer resist

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Expression for the resist thickness t is given as Where C polymer concentration in mass per unit vol...View the full answer

Manufacturing Processes for Engineering Materials

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