A university lab uses a g-line stepper with NA = 0.4 and a spatial coherence of 0.5 On a good day, with flat substrates, this machine can resolve 0.8 μm lines and 0.8μmm spaces, but nothing smaller. Find the contrast of the resist process being used.

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A university lab uses a gline stepper with NA 04 and a spatial coherence of 05 The machine can resol... View the full answer