Question: ( 1 5 points, based on Example 4 . 1 7 ) A micro actuator is made of a bilayer strip - a silicon layer

(15 points, based on Example 4.17) A micro actuator is made of a bilayer strip - a silicon layer
with a polyimide film on top. A very thin resistance heating film is deposited between the two
layers. If the two layer strip is subjected to a uniform temperature rise T=10C,
(a) Calculate the radius of curvature (do not use wrong equation (4.51) in the textbook).
(b) Calculate the interfacial force between the Si and the polyimide layer (do not use wrong
equation (4.50) in the textbook).
(c) Calculate the displacement of the free end.
( 1 5 points, based on Example 4 . 1 7 ) A micro

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