Question: ( 1 5 points, based on Example 4 . 1 7 ) A micro actuator is made of a bilayer strip - a silicon layer
points, based on Example A micro actuator is made of a bilayer strip a silicon layer
with a polyimide film on top. A very thin resistance heating film is deposited between the two
layers. If the two layer strip is subjected to a uniform temperature rise
a Calculate the radius of curvature do not use wrong equation in the textbook
b Calculate the interfacial force between the Si and the polyimide layer do not use wrong
equation in the textbook
c Calculate the displacement of the free end.
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