Question: 1 . ( a ) A measured value of sheet resistance after pre - deposition was found to be in the order of 1 2

1.(a)A measured value of sheet resistance after pre-deposition was found to be in the order of1200-o. The sheet resistance value after drive-in process was observed to be in the order of80-o. Find the correct reason and justify the answer.(i) The impurities are diffused in the bulk.(ii) The mobility improvement due to transformation of interstial diffusion to substitutiondiffusion.(iti) The junction depth changed due to drive-in process. (iv) None.

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