Question: 1 . A solid - solubility - limited boron predeposition step is performed into an n - type Si substrate with a background concentration CB

1. A solid-solubility-limited boron predeposition step is performed into an n-type Si substrate with a background concentration CB of 1.01016/cm3. The predeposition thermal cycle is 975C for 15 minutes. Given: Boron solid solubility @ 975C=3.51020/cm3

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