Question: 1 Resonating rings 2 Functionalized cantilevers 3 Interdigitated comb capacitors 4 Bimorph switches 5 Piezoelectric membranes 6 Electrostatically driven elastic hinges a. Gyroscopes b. RF

1 Resonating rings 2 Functionalized cantilevers 3 Interdigitated comb capacitors 4 Bimorph switches 5 Piezoelectric membranes 6 Electrostatically driven elastic hinges a. Gyroscopes b. RF relays c. Digital projectors d. Molecular detectors e. Accelerometers f. Microphones

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