16. What is wrong with the Lithography process? (5 points)

(1) Conduct a process in the clean room and proceed in the white room.

(2) The lower the class, the more stable the process is possible.

(3) The shorter the wavelength of light, the more fine pattern is possible.

(4) Use light-sensitive photoresist material.

17. What happens when additional n-type dopants, such as hydrogen ions, are injected in a synaptic device of a transistor structure using a semiconductor channel layer of n-type oxides such as IGZO, ZnO, etc.? (5 points)

(1) Increase the capacitance of the gate insulator.

(2) Charge traps occur inside the gate insulating film.

(3) The degree of charge movement within the channel is reduced.

(4) The concentration of conductors in the channel increases, reducing the threshold voltage and increasing the drain current.

18. Which of the following Oxidation processes is incorrect? (5 points)

(1) There are Dry and Wet methods, and the oxide membrane of Dry method is better, while the deposition speed is slow.

(2) At the beginning of the process, the reaction rate determines the oxidation rate, but when the thin film thickens, the diffusion speed determines the oxidation rate.

(3) As the surfactant characteristics of Si in relation to CVD deposition are excellent, the surfactant characteristics of gate lamp are used in the process where the characteristics of the surface are important.

(4) SiO2's density is greater than Si's, resulting in volume change during oxidation, and the Si consumed is equivalent to 46% of the thickness of the oxide.

19. Which substrate material is suitable for the LTPS process when manufacturing flexible displays (5 points)?

(1) PET

(2) PC

(3) PI

(4) PMMA

20. Which statement about metamaterials is incorrect? (5 points)

(1) The size of the nanostructures that make up meta-materials is very small than the wavelength of light, so light does not recognize individual structural shapes.

(2) Using meta-materials, materials with new photometric characteristics such as sound refractive index that does not exist in the natural world can be made.

(3) The size of the meta-nuclear atom that forms meta-materials is similar to the size of the actual atom.

(4) Can be applied to transparent cloaks, high-performance antennas, high-sensitivity sensors, etc.