Question: 2. A heater for a semiconductor wafer has very complex dynamics. It is described as 10(0.25s? +S+1) (2.4s+1) (s+1) T(S)=e5S Q(s) Solve the process equation

2. A heater for a semiconductor wafer has very complex dynamics.

2. A heater for a semiconductor wafer has very complex dynamics. It is described as 10(0.25s? +S+1) (2.4s+1) (s+1) T(S)=e5S Q(s) Solve the process equation using Skogestad's method for approximating transfer function 1st order plus delay time. The transfer function relating changes in the heater input power level Q to changes in temperature Tis T(S) Kels Q(s) TS+1 where Lis delay time [s], Khas units [C/kW] and t has units (min). a) What is the time constant t in this process transfer function? (4 pts) b) What is the new time delay L? (4 pts) c) What is the process gain k? (2 pts)

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