Question: 2 . As shown in the figure below, the sacrificial layer is removed by undercutting through the access hole. The top structural layer is uniform
As shown in the figure below, the sacrificial layer is removed by undercutting through the access hole. The top structural layer is uniform with mu mathrm~m thick. The length of the sacrificial layer is mu mathrm~m During the release, the structural layer is also exposed to the sacrificial etch. Assume that the sacrificial layer etch proceeds at a uniform rate mathrmRmu mathrm~mmathrmmin and the etch has a selectivity of :
a Calculate the time required to remove the sacrificial layer.
b Calculate the profile of the walls inside the channel.
c What is the final shape of the channel.
d What is the minimum and maximum thickness.
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