Question: 2 . Vacuum System ( 1 2 points ) You have been asked to design a vacuum chamber which can reach an ultimate pressure of
Vacuum System points
You have been asked to design a vacuum chamber which can reach an ultimate pressure of torr, after bakeout. We expect the chamber surfaces, even after cleaning and baking them, will have an outgassing rate of torrliters mathrmsec The chamber will be used as a sputtering chamber, where it is necessary to pump large quantities of argon at pressures of about torr.
What pumping speed is needed to maintain the base pressure? pts
What kind of pumps would you recommend we use and why? pts
We must connect the pump to the chamber through a pipe cm long. What should the diameter of the pipe be Assume a pressure drop of times torr and the conductance is expressed in the molecular flow regime as mathrmCmathrm~dmathrmL where d is a diameter and L is a length. pts
Sketch the configuration of this chamber, showing the interconnections between the pumps and the chamber. pts
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