Question: 2 . Vacuum System ( 1 2 points ) You have been asked to design a vacuum chamber which can reach an ultimate pressure of

2. Vacuum System (12 points)
You have been asked to design a vacuum chamber which can reach an ultimate pressure of \(10^{-10}\) torr, after bakeout. We expect the chamber surfaces, even after cleaning and baking them, will have an outgassing rate of \(10^{-7}\) torr-liters \(/\mathrm{sec}\). The chamber will be used as a sputtering chamber, where it is necessary to pump large quantities of argon at pressures of about \(10^{-5}\) torr.
1) What pumping speed is needed to maintain the base pressure? (3 pts)
2) What kind of pump(s) would you recommend we use and why? (3 pts)
3) We must connect the pump to the chamber through a pipe 50 cm long. What should the diameter of the pipe be? Assume a pressure drop of \(5\times 10^{-11}\) torr and the conductance is expressed in the molecular flow regime as \(\mathrm{C}=12.2\mathrm{~d}^{3}/\mathrm{L}\) where d is a diameter and L is a length. (3 pts)
4) Sketch the configuration of this chamber, showing the interconnections between the pump(s) and the chamber. (3 pts)
2 . Vacuum System ( 1 2 points ) You have been

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