Question: 4.) A 2575wt%AlCu alloy source is to be sputtered on a silicon wafer. What composition (wt%) will the source have at steady-state? Assume we are

4.) A 2575wt%AlCu alloy source is to be sputtered on a

4.) A 2575wt%AlCu alloy source is to be sputtered on a silicon wafer. What composition (wt\%) will the source have at steady-state? Assume we are using 1keVAr, with sputter yields of SAl= 1.527 and SCu=2.821

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