Question: 5 . 2 5 Indium atoms are diffused into the silicon wafer through the two - step heat treatment of pre - deposition and inlay.
Indium atoms are diffused into the silicon wafer through the twostep heat treatment of predeposition and inlay. It is known that the background concentration of indium in the silicon material is times atomsm The inlay heat treatment was performed at deg C for h and the inlay depth x was obtained at m If the surface concentration is maintained at x atomsm calculate the time required for predeposition diffusion at deg C It is known that the diffusion of impurity in silicon is eV atom; the value of Do is times ms
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