Question: 5 . 2 5 Indium atoms are diffused into the silicon wafer through the two - step heat treatment of pre - deposition and inlay.

5.25 Indium atoms are diffused into the silicon wafer through the two-step heat treatment of pre-deposition and inlay. It is known that the background concentration of indium in the silicon material is 2\times 1020 atoms/m^3. The inlay heat treatment was performed at 1175\deg C for 2.0 h, and the inlay depth x was obtained at 2.35m. If the surface concentration is maintained at 2.5x1026 atoms/m^3, calculate the time required for pre-deposition diffusion at 925\deg C. It is known that the diffusion of impurity in silicon is 3.63 eV/ atom; the value of Do is 7.85\times 10-5 m^2/s.

Step by Step Solution

There are 3 Steps involved in it

1 Expert Approved Answer
Step: 1 Unlock blur-text-image
Question Has Been Solved by an Expert!

Get step-by-step solutions from verified subject matter experts

Step: 2 Unlock
Step: 3 Unlock

Students Have Also Explored These Related Civil Engineering Questions!