5. a. Find the time required to grow 0.2 m wet oxide on bare silicon b....

 

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5. a. Find the time required to grow 0.2 m wet oxide on bare silicon b. Find the time required to grow 0.25 m dry oxide on bare silicon ( tox 0x =t+T B/A B Bwet = B wet (A)=(9.70 107 x hr 2.05eV exp kT dry ()(3.71 = = (3.71 106 km) 2.00eV exp kT (386 m) exp(-0.78cV) hr With HO (wet oxidation) 1.23eV Bary = 772 exp hr kT kT With O2 (dry oxidation) As you may recall from thermodynamics, kB is Boltzmann's constant: KB = 1.38x10-23 J/K = 8.617x10-5 eV/K. 5. a. Find the time required to grow 0.2 m wet oxide on bare silicon b. Find the time required to grow 0.25 m dry oxide on bare silicon ( tox 0x =t+T B/A B Bwet = B wet (A)=(9.70 107 x hr 2.05eV exp kT dry ()(3.71 = = (3.71 106 km) 2.00eV exp kT (386 m) exp(-0.78cV) hr With HO (wet oxidation) 1.23eV Bary = 772 exp hr kT kT With O2 (dry oxidation) As you may recall from thermodynamics, kB is Boltzmann's constant: KB = 1.38x10-23 J/K = 8.617x10-5 eV/K.