Question: ( a ) In a photolithographic process, either a positive or negative photoresist is used to transfer micro - and nanoscale patterns onto a silicon
a In a photolithographic process, either a positive or negative photoresist is used to transfer micro and nanoscale patterns onto a silicon wafer.
i List the three essential components of a photoresist and briefly explain their roles.
ii Describe the major advantages and disadvantages of a positive photoresist as compared to a negative photoresist.
iii During exposure to a UV source, briefly describe the photochemical reaction that occurs in a positive photoresist and name the type of developer that is used.
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