Question: ( a ) In a photolithographic process, either a positive or negative photoresist is used to transfer micro - and nanoscale patterns onto a silicon

(a) In a photolithographic process, either a positive or negative photoresist is used to transfer micro- and nanoscale patterns onto a silicon wafer.
(i) List the three essential components of a photoresist and briefly explain their roles.
(ii) Describe the major advantages and disadvantages of a positive photoresist as compared to a negative photoresist.
(iii) During exposure to a UV source, briefly describe the photochemical reaction that occurs in a positive photoresist and name the type of developer that is used.
(9 Marks)
( a ) In a photolithographic process, either a

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