A parallel plate capacitor is suspended by a total of four fixed-fixed cantilever beams (i.e., two cantilevers on each side of the suspended plate), each with length (l), width (w) and thickness (t) as discussed in the class notes. The material of the capacitor is made of single crystallin silicon, with a Young’s modulus of ~150GPa.

Assume that l=100µm, w =10µm, and t=1µm, the gap between two plates is 2 µm, and the area of the suspended plate is 100µmx100µm, please calculate the amount of vertical displacement of the suspended plate when a voltage of 0.5 volts is applied.

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