A p-type (boron) diffusion is performed as follows: Predep: 30 minutes, 900C, solid solubility (assume 8-profile...
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A p-type (boron) diffusion is performed as follows: Predep: 30 minutes, 900°C, solid solubility (assume 8-profile after this step) Drive in: 60 minutes, 1000°C a. What is the deposited Q? b. If the substrate is doped 1×10¹5 cm3 phosphorus, what is x;? c. What is roughly the sheet resistance of the diffused layer? (ignore conductivity due to substrate doping, mobility 500 cm²/V.sec) Note: for diffusion coefficient D, please give the values both by graph (D vs. 1000/T) and by equation (D=Dºe^(-E/kT)), but use the D by equation for the calculation of dose and junction depth. A p-type (boron) diffusion is performed as follows: Predep: 30 minutes, 900°C, solid solubility (assume 8-profile after this step) Drive in: 60 minutes, 1000°C a. What is the deposited Q? b. If the substrate is doped 1×10¹5 cm3 phosphorus, what is x;? c. What is roughly the sheet resistance of the diffused layer? (ignore conductivity due to substrate doping, mobility 500 cm²/V.sec) Note: for diffusion coefficient D, please give the values both by graph (D vs. 1000/T) and by equation (D=Dºe^(-E/kT)), but use the D by equation for the calculation of dose and junction depth.
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a To calculate the deposited Q we need to use the solid solubility profile which is assumed to be an ... View the full answer
Related Book For
Fundamentals Of Momentum Heat And Mass Transfer
ISBN: 9781118947463
6th Edition
Authors: James Welty, Gregory L. Rorrer, David G. Foster
Posted Date:
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