a single axis accelerometer that measures acceleration in the x$-$direction $($i$.$e$.,$ lateral, in$-$plane motion$).$ Measuring acceleration in the y$-$direction could be achieved simply by adding a copy of the same design and rotating it by $90$ degrees. However, the z$-$direction $($perpendicular$,$ out$-$of$-$plane motion$)$ will require a somewhat different design if it is to be fabricated on the same chip.

Suppose you are given a $200$ m x $200$ m area on a silicon wafer that will go through the SCREAM process with a minimum feature size of $1$ m$.$ Your accelerometer should again use a spring$-$mass design with capacitive sensing$.$

$-$Draw a schematic layout of your design and identify the key features, parameters, and dimensions. Remember: The SCREAM process has only a single mask layer.

$-$Calculate the size of the proof mass m and the spring constant K of the suspension.

$-$What is the sensitivity $($measured in C$/$g$)$ and the maximum range $($measured in g$)$ of your accelerometer? g $=9\mathrm{.}81$ m$/$s$2$ is the gravitational acceleration of Earth.

$-$Some designs may exhibit crosstalk, e$.$g$.,$ acceleration in x$-$direction could appear as noise in your measurement of acceleration in the z$-$direction. $($i$)$ Is your design sensitive to crosstalk? $($ii$)$ In a few words, explain how you could change your design to minimize crosstalk.