Question: b . a . This above structure is meant to be a MEMS device where we apply a voltage to the poly - sticon and
b
a This above structure is meant to be a MEMS device where we apply a voltage to the polysticon and
cooper and the structure deflects
What additional step should ideall be done at the end of the process assuming we want an efficient, rapidly responding device? Why? Extra points for mathematical detail hint: a circuit.
Hint: it is one of the core processes ie leamed in class, and is related to polysilicon properties.
bDraw the shape of the device and induced charges when a positive voltage is applied on copper
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