Can someone please help with this question?

1. [30 points} Consider the micro and nanopillars shown in Figure 1 below. Please propose a possible fabrication method for fabrication of the pillars. Hint: The pillars are made of silicon. Also, you must consider the pillar size and shape shown in the figure. Note that a scale bar is given in each image. a} Draw a detailed fabrication flowchart. You must include all key steps. b} Justify your proposed flowchart [provide brief explanation {one or two sentences] for each step}. c} Is it possible to fabricate pillars with smaller diameters using your proposed method? If yes, provide yOur justifications. If no, identify potential issues. Figure 1 Electron beam lithography JEOL JBX-6000 FS/E Electron Beam Lithography | Core Facilities (asu.edu) electron beam source http://www.emresist.com/portfol PMMA. Z EM RES io-item/electron-beam-resists/ PMMA.4 1 st condense lens beam blanker electron beam a 2nd condense lens aperture deflector 10 um 250 nm C d al condense lens resist substrate 1 um 200 nm pin, Alongkorn, and Werayut Srituravanich. "Review on micro- nanolithography techniques and their https://www.nist.gov/programs- lications." Engineering Journal 16, no. 1 (2012): 37-56. projects/electron-beam-lithograph