Question: can you answer the above questions? . Lateral comb actuators are used often in MEMS sensors and actuators. Their primary advantage over varying-gap actuators is

can you answer the above questions?

. Lateral comb actuators are used often in MEMS sensors and actuators. Their primary advantage over varying-gap actuators is (circle all that apply): (3 points) a) They produce a larger force for a given voltage b) The force produced does not change with deflection c) They provide a larger deflection d) They are easier to fabricate . The pull-in voltage phenomenon occurs most frequently in which of the following structures (circle only one): (3 points) (a) Parallel-plate varying overlap-area actuator (b) Vertical parallel-plate varying-gap actuator (c) Lateral comb finger actuator (d) Vertical comb finger actuator (e) Vertical parallel-plate varying overlap-area actuator

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