Consider a gal closing actuator for an accelerometer. The thickness of poly-Si is 2m (Out of plane
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Question:
Consider a gal closing actuator for an accelerometer. The thickness of poly-Si is 2m (Out of plane direction thickness of stiffness). Ignore any structural deflections other than the spring structure.
(1) Calculate the static deflection if the applied voltage is 15V. E=170 GPa.
(2) Calculate the pull-in voltage.
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