Design a process flow to fabricate nanochannels with the dimensions mentioned in the article. You need to draw a flow chart with sufficient process steps to form silica nanochannels (120 m long, 3.5 m wide, and 30 nm in depth) on a fused silica substrate. Examples of information the flow chart needs to include, are the names of materials deposited, etched or patterned, the names of the process (e.g. etch or deposition), and the type of photoresist (negative or positive) if needed. If you use a mask, please mark the areas that are transparent or opaque and their dimensions.

article: Karnik, R., Castelino, K., Fan, R., Yang, P. and Majumdar, A., 2005. Effectsof biological reactions