Develop a BioMEMS device for cell mechanics study, featuring a silicon-based comb-drive actuator paired with a silicon-based cantilever. The setup involves the actuator supporting and propelling the cantilever, which exerts a force of 10 nN on a white blood coll of 15-um diameter that is anchored to the substrate. Despite the application of this 10 nN force, the cell remains stationary, resulting in & 2 ym deep iIndentation. 1. In your design, specify structural details such as the number of comb fingers, the spacing between these fingers, the required voltage for operation, as well as the dimensions of both the fingers and the cantilever. 2. Design a manufacturing process flow for your design. Tip: Consult the comb-drive actuator lecture notes. Given the open-ended nature of this _ question, understand that there are multiple viable approaches to th Is design challenge. If it can be step by step even better! Need to do a schematic design