Question: Estimate the resolution which can be obtained using e - beam lithography given a 1 0 kV beam to be used on a PMMA resist.
Estimate the resolution which can be obtained using ebeam lithography given a kV beam to be used on a PMMA resist. Explain your estimate.
Step by Step Solution
There are 3 Steps involved in it
1 Expert Approved Answer
Step: 1 Unlock
Question Has Been Solved by an Expert!
Get step-by-step solutions from verified subject matter experts
Step: 2 Unlock
Step: 3 Unlock
