Question: for a given light exposure for photolithography with = 2 4 8 mm , d 0 . 5 um and s = 1 0 um

for a given light exposure for photolithography with =248 mm, d 0.5 um and s =10 um, calculate the b distances values for contact and proximity printing and comments on it
Problem 4.
(a) Obtain the time constant, , of the following model. (5 points)
8x+4x=100
(b) For the model in Part (a), how long it will take the response to reach steady-state? (5 points)
Appendix: Percent maximum overshoot MO(%)as functions of the damping ratio, .
(a)
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for a given light exposure for photolithography

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