Question: for a given light exposure for photolithography with = 2 4 8 mm , d 0 . 5 um and s = 1 0 um
for a given light exposure for photolithography with mm d um and s um calculate the b distances values for contact and proximity printing and comments on it
Problem
a Obtain the time constant, of the following model. points
b For the model in Part a how long it will take the response to reach steadystate? points
Appendix: Percent maximum overshoot as functions of the damping ratio,
a
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