Question: In operating a vacuum system dedicated to a certain processing method it is necessary to pump down to base pressure before backfilling with the

In operating a vacuum system dedicated to a certain processing method it is necessary to pump down to base pressure before backfilling with the working gas to the correct working pressure. What is the primary reason for reaching a base pressure a required step? O to test the mechanical limit of the pumps during normal operation O to pump out impurities from the vacuum chamber O to determine the lowest pressure that can be reached by the pumps O to achieve molecular flow regime within the vacuum chamber
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