Question: Let's compare exposure times for photolithography and e - beam lithography. In both cases, let's assume a smallest feature length scale of 5 0 nm

Let's compare exposure times for photolithography and e-beam lithography. In both cases, let's assume a "smallest feature" length scale of 50 nm , and in both cases the entire structure will be fabricated on a square wafer 1 cm to a side. For the UV case, you need a fluence of \(60\mathrm{~mJ}/\mathrm{cm}^{2}\), and your UV source has an output power of 10 mW . For the ebeam case, your beam has a current of 120 pA , and the resist needs a dosage of 240\(\mu \mathrm{C}/\mathrm{cm}^{2}\). Calculate for both a raster scan and a vector scan in which \(33\%\) of the area is to be exposed with a shutter time of \(10\%\) that of the dwell time.
Let's compare exposure times for photolithography

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