Question: Let's compare exposure times for photolithography and e - beam lithography. In both cases, let's assume a smallest feature length scale of 5 0 nm
Let's compare exposure times for photolithography and ebeam lithography. In both cases, let's assume a "smallest feature" length scale of nm and in both cases the entire structure will be fabricated on a square wafer cm to a side. For the UV case, you need a fluence of mathrm~mJmathrmcm and your UV source has an output power of mW For the ebeam case, your beam has a current of pA and the resist needs a dosage of mu mathrmCmathrmcm Calculate for both a raster scan and a vector scan in which of the area is to be exposed with a shutter time of that of the dwell time.
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