Question: P 3 . Electrostatic actuation is the most common type of actuation used for sensing applications. A lumped - model of spring - mass system
P Electrostatic actuation is the most common type of actuation used for sensing
applications. A lumpedmodel of springmass system is used to analyze the plate
deflection under DC voltage. The governing equation is
mxcxkxFelec
Felecepsi AVgx
Where AmmkNmepsi Fmgmm For static analysis, any time
dependent variables are set to zero. Using Matlab, find the static deflection x caused by
Vvolts; plot deflection x vs V
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