Question: P 3 . Electrostatic actuation is the most common type of actuation used for sensing applications. A lumped - model of spring - mass system

P3. Electrostatic actuation is the most common type of actuation used for sensing
applications. A lumped-model of spring-mass system is used to analyze the plate
deflection under DC voltage. The governing equation is
mx^()+cx^()+kx=F_(elec)
F_(elec)=(\epsi AV^(2))/(2(g-x)^(2))
Where A=1mm^(2),k=1(N)/(m),\epsi =8.85(10^(-12))(F)/(m),g=1mm. For static analysis, any time-
dependent variables are set to zero. Using Matlab, (1) find the static deflection x caused by
V=2volts; (2) plot deflection (x) v.s. V.
P 3 . Electrostatic actuation is the most common

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