Particle deposition rate J on a wafer that is parallel to airflow is given by J nu, where n is the particle density and u is the sum of gravitational and diffusive settling velocities, 5 x 10 cm s for 0 1 to 0 5um particles How many particles will deposit on a 200mm wafer in an ISO class 2 cleanro...

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Fundamentals of Ethics for Scientists and Engineers

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Authors: Edmund G. Seebauer, Robert L. Barry

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