please print answer beacuse the hand write is not clear

(2) (a). Refer to Figure 2.1, answer all questions. base (substrate) spring is motion fixed outer plates movable plates VO proof mass movable microstructure spring his base (substrate) Figure 2.1 (i). State the type of the sensor shown in Figure 2.1 (5/100) (ii). Explain the sensing mechanism of the sensor with a proper mathematical equation derivation. (25/100) (iii). List 4 important parameters of the sensor selection. (10/100)