Question: Please provide the accurate answer with figures and numbers. Thank you and will rate you highly! 1. Estimate the resolution of a projection nano(photo)lithography system,

Please provide the accurate answer with figures and numbers. Thank you and will rate you highly!
Please provide the accurate answer with figures and numbers. Thank you and

1. Estimate the resolution of a projection nano(photo)lithography system, which provides depth of focus of 250 nm with KrF excimer laser illumination

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