Problem $1,$ Movable Micromechanical Structure Paper $(20$ points$)$

Draw the cross sectional view of a self$-$constrained pin joint by using the MUMPs process $($figure

illustrations on the left and brief process details on the right$)-$ you can ignore the layers that you

don't plan to use. $(10$ points$)$ Indicate the various layer $($or material$)$ names of each layer. Please

also indicate in your process sequence where masks should be used and if the mask should be a

clear or a dark mask. $(10$ points$)$ You may have to etch the nitride layer in this process.