Question: Problem 2 , Comb - Shape Resonator Paper ( 2 0 points ) a . What are the energy dissipation mechanisms of the comb drive?

Problem 2, Comb-Shape Resonator Paper (20 points)
a. What are the energy dissipation mechanisms of the comb drive? What is Couette flow?
What is Stokes flow? What are the way(s) to increase the quality factor? (10 points)
b. List any difference in the manufacturing process of this paper as compared with the
standard MUMPs process? (10 points)
Problem 2 , Comb - Shape Resonator Paper ( 2 0

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