Question: Problem 2 If the evaporation source is very far from the wafer, we can treat the evaporation fluxes to be uniform and parallel. The following
Problem
If the evaporation source is very far from the wafer, we can treat the evaporation fluxes to be uniform and parallel. The following contact opening has vertical sidewalls and the evaporating flux is making an angle with respect to the normal of the wafer's surface. If the film deposition rate is sketch the crosssectional profile of the film over the SiO and Si after a min and b min The SiO step height is and the contact opening is Dimensions of your sketches have to be proportional.
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